منابع مشابه
Excimer laser photoablation of silicon
The ultraviolet and visible emission spectra from excimer laser-produced silicon plasmas were studied and the ablation rate measured as a function of laser energy density and wavelength. A spectroscopic investigation of the laser-produced plasma showed Si I, Si II, and Si III spectral lines with higher laser intensity causing a higher degree of ionization in the plasma. Both timeintegrated and ...
متن کاملQuantum cascade laser on silicon
ALEXANDER SPOTT,* JON PETERS, MICHAEL L. DAVENPORT, ERIC J. STANTON, CHARLES D. MERRITT, WILLIAM W. BEWLEY, IGOR VURGAFTMAN, CHUL SOO KIM, JERRY R. MEYER, JEREMY KIRCH, LUKE J. MAWST, DAN BOTEZ, AND JOHN E. BOWERS Department of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106, USA Code 5613, Naval Research Laboratory, Washington, DC 20375, USA Depar...
متن کاملExcimer Laser-Annealing of Amorphous Silicon Layers
This paper describes a one-dimensional model of excimer laser-annealing of amorphous silicon layers which are irradiated with a pulsed KrF excimer laser. For realisation of the model in COMSOL Multiphysics, the application mode heat transfer in solids is used. The model predicts a melt threshold for the energy density of the laser of Eth = 88.5 mJ/cm. It also predicts a linear increase of the m...
متن کاملElectrically pumped hybrid AlGaInAs-silicon evanescent laser.
An electrically pumped light source on silicon is a key element needed for photonic integrated circuits on silicon. Here we report an electrically pumped AlGaInAs-silicon evanescent laser architecture where the laser cavity is defined solely by the silicon waveguide and needs no critical alignment to the III-V active material during fabrication via wafer bonding. This laser runs continuous-wave...
متن کاملSimulation of femtosecond laser ablation of silicon
Femtosecond laser ablation is an important process in the micromachining and nanomachining of microelectronic, optoelectronic, biophotonic and MEMS components. The process of laser ablation of silicon is being studied on an atomic level using molecular dynamics (MD) simulations. We investigate ablation thresholds for Gaussian laser pulses of 800 nm wavelength, in the range of a few hundred femt...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Optics Express
سال: 2010
ISSN: 1094-4087
DOI: 10.1364/oe.18.006455